Reciprocate the stage with a load placed vertically on its upper surface,
and measure the state change at that time.
| Measurement Sample | TSD-601 |
| Load | 100N |
| Procedure | 13 mm × Both ways/sec (continuous operation) |
| Operation Cycles (Distance) | 10 million times (260km) |
TSD series
After 10 million cycles of operation, the guide performance is stable without significant change in the stiffness, straightness, pitching, yawing, and running parallelism of the stage guide.
Reciprocate the stage with a load placed vertically on its upper surface,
and measure the state change at that time.
| Measurement Sample | GOHT-60A85B |
| Load | 50N |
| Procedure | ±15° × One way/sec (continuous operation) |
| Operation Cycles (Distance) | 600,000 times (30 km) |
GOHT series
After 600,000 cycles of operation, the guide performance is stable without significant change in the stiffness and rotation center displacement of the stage guide.
Reciprocate the stage with a load placed vertically on its upper surface,
and measure the state change at that time.
| Measurement Sample | KSPT-606MH |
| Load | 100N |
| Procedure | ±10° × Both ways/sec (continuous operation) |
| Operation Cycles (Distance) | 100,000 times (1km) |
KSPT series
After 100,000 cycles of operation, the guide performance is stable without significant change in the stiffness, wobble, and parallelism of the stage guide.
Reciprocate the stage with a load placed vertically on its upper surface,
and measure the state change at that time.
| Measurement Sample | TSD-601 |
| Load | 100N |
| Procedure | 13 mm × Both ways/sec (continuous operation) |
| Operation Cycles (Distance) | 10 million times (260km) |
TSD series
After 10 million cycles of operation, the guide performance is stable without significant change in the stiffness, straightness, pitching, yawing, and running parallelism of the stage guide.
Reciprocate the stage with a load placed vertically on its upper surface,
and measure the state change at that time.
| Measurement Sample | GOHT-60A85B |
| Load | 50N |
| Procedure | ±15° × One way/sec (continuous operation) |
| Operation Cycles (Distance) | 600,000 times (30 km) |
GOHT series
After 600,000 cycles of operation, the guide performance is stable without significant change in the stiffness and rotation center displacement of the stage guide.
Reciprocate the stage with a load placed vertically on its upper surface,
and measure the state change at that time.
| Measurement Sample | KSPT-606MH |
| Load | 100N |
| Procedure | ±10° × Both ways/sec (continuous operation) |
| Operation Cycles (Distance) | 100,000 times (1km) |
KSPT series
After 100,000 cycles of operation, the guide performance is stable without significant change in the stiffness, wobble, and parallelism of the stage guide.
